VAPOR DEPOSITION MASK, AND MANUFACTURING METHOD OF VAPOR DEPOSITION MASK

To provide a vapor deposition mask capable of heightening weld strength, while suppressing occurrence of deformation such as warp.SOLUTION: A vapor deposition mask 20 includes an outside part 17 of the vapor deposition mask 20, and an inside part 18 arranged inside the outside part 17. A plurality o...

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1. Verfasser:	MIYATANI ISAO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a vapor deposition mask capable of heightening weld strength, while suppressing occurrence of deformation such as warp.SOLUTION: A vapor deposition mask 20 includes an outside part 17 of the vapor deposition mask 20, and an inside part 18 arranged inside the outside part 17. A plurality of open holes 25 are formed through the inside part 18. The outside part 17 is constituted of an iron alloy containing nickel, and contains a sulfur constituent. The sulfur content in the outside part 17 is 0.019 mass% or more and 0.046 mass% or less.SELECTED DRAWING: Figure 6 【課題】反り等の変形が生じることを抑制しつつ、溶接強度を高めることができる蒸着マスクを提供する。【解決手段】蒸着マスク２０は、蒸着マスク２０の外側部１７と、外側部１７の内側に配置された内側部１８と、を備えている。内側部１８に、複数の貫通孔２５が形成されている。外側部１７は、ニッケルを含む鉄合金によって構成されるとともに硫黄成分を含有している。外側部１７における硫黄含有量は、０．０１９質量％以上且つ０．０４６質量％以下である。【選択図】図６