VACUUM EVAPORATION DEVICE

To provide a vacuum evaporation device having a regulation plate which suppresses blocking of a scattering path toward an evaporation object of a sublimated or vaporized evaporation material as much as possible, even if the evaporation material is adhered and deposited.SOLUTION: A vacuum evaporation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KITAZAWA RYOYA, UMEHARA SEIJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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