THIN FILM CAPACITOR MANUFACTURING METHOD AND THIN FILM CAPACITOR

To provide a thin film capacitor manufacturing method and a thin film capacitor which can suppress an electrode layer from being excessively etched.SOLUTION: A method for manufacturing a thin film capacitor 1 comprises: a lamination step of laminating a plurality of electrode layers (internal electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UEJIMA SATOSHI, MATSUZAKA NORIHIKO, NAKAMOTO JUNKI, KUMAGAI MICHIHIRO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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