DISPLACEMENT MEASURING METHOD AND DISPLACEMENT MEASURING DEVICE

To provide a displacement measuring method and a displacement measuring device with which it is possible to suppress a measurement error and accurately measure the displacement of a measurement surface when measuring the displacement of a measurement surface utilizing a phase variation obtained from...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KINOSHITA TAKAHIRO, SUGIBASHI ATSUSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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