DISPLACEMENT MEASURING METHOD AND DISPLACEMENT MEASURING DEVICE

To provide a displacement measuring method and a displacement measuring device with which it is possible to suppress a measurement error and accurately measure the displacement of a measurement surface when measuring the displacement of a measurement surface utilizing a phase variation obtained from a 6-port circuit.SOLUTION: With a displacement measuring device 1, since a 6-port circuit 11 is used and a phase delay amount at each frequency in the 6-port circuit 11 is predefined, even when measuring a displacement D using a transmit signal whose frequency is changed in relation to time, it is possible to suppress a measurement error in the 6-port circuit 11 and accurately measure the displacement D of a measurement surface 10. Furthermore, with the displacement measuring device 1, as 2π uncertainty is removable, it is possible to suppress a measurement error and accurately measure the displacement D of the measurement surface 10 to that extent.SELECTED DRAWING: Figure 1 【課題】６ポート回路から得られた位相変化量を利用して測定面の変位を測定するにあたり、測定誤差を抑制して測定面の変位を正確に測定できる変位測定方法及び変位測定装置を提供する。【解決手段】変位測定装置１では、６ポート回路１１を用いるとともに、周波数を時間に対して変化させた送信信号を用いて変位Ｄを測定しても、各周波数における６ポート回路１１での位相遅延量を予め規定していることから、６ポート回路１１での測定誤差を抑制して測定面１０の変位Ｄを正確に測定できる。また、変位測定装置１では、２πの不定性を取り除くことができるので、その分、測定誤差を抑制して測定面１０の変位Ｄを正確に測定できる。【選択図】図１