LAMINATION APPARATUS
To provide a lamination apparatus that can reliably prevent air from remaining between a film and a substrate and can laminate the film on the substrate without generating voids or wrinkles.SOLUTION: A lamination apparatus has mounting means A for placing a film 1 on a substrate 2, pressing means B...
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Zusammenfassung: | To provide a lamination apparatus that can reliably prevent air from remaining between a film and a substrate and can laminate the film on the substrate without generating voids or wrinkles.SOLUTION: A lamination apparatus has mounting means A for placing a film 1 on a substrate 2, pressing means B for pressing a mounting body 10, and decompression means C capable of sealing and decompressing at least surroundings of the mounting means A. The mounting means A has a film holding part 3 that holds the film 1, and forms the mounting body 10 on which the film 1 is mounted on the substrate 2 by positioning so that the substrate 2 and the film 1 held by the film holding part 3 face each other and bringing the film 1 of the film holding part 3 into contact with the substrate 2 under a reduced-pressure atmosphere. The pressing means B presses the mounting body 10 to form a laminate from the mounting body 10.SELECTED DRAWING: Figure 1
【課題】フィルムと基材との間に空気が残留することを確実に防止し、ボイドやしわを発生させずに基材にフィルムを積層することのできる積層装置を提供する。【解決手段】基材2上にフィルム1を載置する載置手段Aと、載置体10を押圧する押圧手段Bと、少なくとも上記載置手段Aの周囲を密封し減圧しうる減圧手段Cとを有し、上記載置手段Aが、上記フィルム1を保持するフィルム保持部3を有し、上記基材2と上記フィルム保持部3に保持されたフィルム1とが対峙するよう位置合わせし、減圧雰囲気下で上記フィルム保持部3のフィルム1を基材2に当接させることにより上記基材2にフィルム1が載置された載置体10を形成するようになっており、上記押圧手段Bが、上記載置体10を押圧することにより、上記載置体10を積層体に形成する積層装置。【選択図】図1 |
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