OPTICAL DEVICE AND METHOD FOR MANUFACTURING THE SAME
To provide an optical device in which the direction of polarization of the EO element in the optical waveguide is locally different and still the yield of manufacturing is excellent and the optical loss of the optical waveguide is suppressed, and a method for manufacturing the optical device.SOLUTIO...
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Zusammenfassung: | To provide an optical device in which the direction of polarization of the EO element in the optical waveguide is locally different and still the yield of manufacturing is excellent and the optical loss of the optical waveguide is suppressed, and a method for manufacturing the optical device.SOLUTION: The present invention relates to a method for manufacturing an optical device formed of, on a substrate 1, lower electrode layers (20, 21), a lower cladding layer 3, a core layer 4, an upper cladding layer 5, and an upper electrode layer, which are sequentially deposited, the core layer being formed by an EO polymer. The lower electrode layers have at least separate plural electrodes (20, 21) corresponding to the polling positions of the core layer. When the core layer is polling processed, the direction of performing polling processing on the core layer is selectively set different by using the electrodes and a common electrode 7 on the cladding layer 5 corresponding to the electrodes.SELECTED DRAWING: Figure 4
【課題】光導波路のEO色素の分極方向が局所的に異なる光デバイスであっても、製造の歩留まりが良く、光導波路の光損失が抑制された光デバイス及びその製造方法を提供すること。【解決手段】基板1上に、下部電極層(20,21)、下部クラッド層3、コア層4、上部クラッド層5、及び上部電極層が順次積層された構成を備え、該コア層がEOポリマーで形成された光デバイスの製造方法において、該下部電極層は、該コア層のポーリング位置に対応した、少なくとも分離した複数の電極(20,21)を備え、該コア層をポーリング処理する際には、前記複数の電極と、前記複数の電極に対応し、該上部クラッド層5の上側に設けられた共通電極7とを利用して、該コア層のポーリング処理をする方向を選択的に異なる方向に設定することを特徴とする。【選択図】図4 |
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