ELECTRON BEAM DEVICE AND SAMPLE INSPECTION METHOD

To provide an electron beam device suitable for observing a bottom part of a depth groove or a depth hole at high precisely under a large current condition.SOLUTION: An electron beam device includes: an electron optics system having an irradiation optical system irradiating an electron beam 116 from...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIMURA MANAMI, HAYATA YASUNARI, HAMADA KOICHI, MARUYAMA MOMOYO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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