ELECTRON BEAM DEVICE AND SAMPLE INSPECTION METHOD

To provide an electron beam device suitable for observing a bottom part of a depth groove or a depth hole at high precisely under a large current condition.SOLUTION: An electron beam device includes: an electron optics system having an irradiation optical system irradiating an electron beam 116 from an electron source 100 to a first opening 153 and a contraction projection optical system projecting and imaging an opening image of the first opening on a sample; detectors 121 and 122 detecting a secondary electron 117 discharged by irradiating the sample with the electron beam by the electron optics system; and an image processing unit 148 generating a two-dimensional image from a detection signal of each detector obtained by irradiating the sample with the electron beam while two-dimensionally scanning the electron beam by scanning deflectors 106 and 108 of the electron optics system. The image processing unit generates a reproduction image by deconvoluting electron beam intensity distribution information of an ideal opening image of the first opening from two-dimensionally image information from the detection signal.SELECTED DRAWING: Figure 1 【課題】深溝や深孔の底部を大電流条件で高精度に観察するのに適した電子ビーム装置を提供する。【解決手段】電子源１００からの電子ビーム１１６を第１の開口１５３に照射する照射光学系と、第１の開口の開口像を試料上に投影結像する縮小投影光学系とを有する電子光学系と、電子光学系により電子ビームが試料に照射されることにより放出される２次電子１１７を検出する検出器１２１，１２２と、電子光学系の走査偏向器１０６，１０８により、電子ビームを２次元に走査しながら試料に照射して得られた検出器の検出信号から２次元画像を生成する画像処理部１４８とを有し、画像処理部は、検出信号からの２次元画像情報から第１の開口の理想開口像の電子ビーム強度分布情報をデコンボリューションして再構成画像を生成する。【選択図】図１