INSPECTION SYSTEM, IMAGE PROCESSING APPARATUS, AND INSPECTION METHOD

To achieve high accuracy of conduction inspection.SOLUTION: In an inspection system having a microscope for scanning a specimen with a beam of charged particles, and a control arrangement for controlling the microscope, the control arrangement executes an acquisition processing for acquiring multipl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OHASHI KENYOSHI, IKODA MASAMI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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