LASER LIGHT SOURCE DEVICE AND INSPECTION APPARATUS

To provide a laser light source device that accomplishes a reduction in speckle noise with a long service life while using high-power laser.SOLUTION: A laser light source device emitting a laser beam comprises: a luminous flux branching part that branches a luminous flux emitted from the laser light...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ISHIKAWA NAOMICHI, OKUBO KENJI, MURATA HIROYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PHYSICS STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR TESTING WEAPONS
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Beschreibung
Zusammenfassung:	To provide a laser light source device that accomplishes a reduction in speckle noise with a long service life while using high-power laser.SOLUTION: A laser light source device emitting a laser beam comprises: a luminous flux branching part that branches a luminous flux emitted from the laser light source into a first branched luminous flux and a second branched luminous flux; and a luminous flux synthesizing part that synthesizes the first branched luminous flux and the second branched luminous flux. A length of an optical path of the second branched luminous flux is set to be longer than a length of an optical path of the first branched luminous flux, and diffusion plates are provided on the optical paths of the first branched luminous flux and the second branched luminous flux.SELECTED DRAWING: Figure 1 【課題】高出力レーザを用いつつ、長寿命でスペックルノイズを低減させたレーザ光源装置を提供すること。【解決手段】レーザ光を出射するレーザ光源装置であって、レーザ光源から出射した光束を第１分岐光束および第２分岐光束に分岐する光束分岐部と、第１分岐光束および第２分岐光束を合成する光束合成部とを備え、第１分岐光束の光路長よりも第２分岐光束の光路長の方が長く設定されており、第１分岐光束および第２分岐光束の光路に拡散板を備えている。【選択図】図１