APPEARANCE INSPECTION DEVICE
To provide an appearance inspection device that can inspect a high-reflection abnormal object and a low-reflection abnormal object on an inspection target object by one imaging.SOLUTION: The appearance inspection device is for detecting an abnormal target F of an inspection target object 1 from the...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide an appearance inspection device that can inspect a high-reflection abnormal object and a low-reflection abnormal object on an inspection target object by one imaging.SOLUTION: The appearance inspection device is for detecting an abnormal target F of an inspection target object 1 from the appearance of the inspection target object 1, and includes: an illumination 3a for irradiating the inspection target body 1 with light of a predetermined wavelength band from the above; an illumination unit 3b for irradiating the inspection target body 1 with light of a wavelength band separate from the predetermined wavelength band at a low angle; and imaging means 4 for detecting reflected from the illumination 3a and the illumination 3b.SELECTED DRAWING: Figure 1
【課題】１回の撮像で被検体上の高反射異常対象物と低反射異常対象物を検査することができる外観検査装置を提供する。【解決手段】外観検査装置は、被検体１の外観から被検体１の異常対象物Ｆを検出する外観検査装置であって、所定波長帯域の光を被検体１に上方から照射する照明３ａと、所定波長帯域から離れた波長帯域の光を被検体１に対してローアングルで照射する照明３ｂと、照明３ａと照明３ｂの反射光を検出する撮像手段４と、を備える。【選択図】図１ |
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