LIGHTING METHOD, INSPECTION METHOD, LIGHTING DEVICE, AND INSPECTION DEVICE

To provide a lighting method, an inspection method, a lighting device, and an inspection device with which it is possible to improve the uniformity of intensity of illumination light integrated across an inspection area.SOLUTION: A lighting method pertaining to the present invention includes the steps of: arranging a first ellipsoidal mirror 103 in such a way that illumination light extracted from a light source 101 is reflected and condensed on a first focal point IF1; arranging a second ellipsoidal mirror 104 in such a way that illumination light spreading from the first focal point IF1 after being condensed on the first focal point IF1 is reflected and condensed; arranging a shielding member 115 in the vicinity of the first focal point IF1 that shields edges on both sides of the illumination light across the optical axis; and lighting an inspection object 110 with the illumination light condensed via the first ellipsoidal mirror 103 and the second ellipsoidal mirror 104.SELECTED DRAWING: Figure 1 【課題】検査領域に渡って積算される照明光の強度の均一化を向上させることができる照明方法、検査方法、照明装置及び検査装置を提供する。【解決手段】本発明に係る照明方法は、光源１０１から取り出された照明光を反射させて第１集光点ＩＦ１に集光させるように第１楕円面鏡１０３を配置するステップと、第１集光点ＩＦ１で集光した後に第１集光点ＩＦ１から拡がる照明光を反射させて集光させるように第２楕円面鏡１０４を配置するステップと、第１集光点ＩＦ１の近傍に、照明光における光軸を挟んだ両側の端縁部を遮光する遮光部材１１５を配置させるステップと、第１楕円面鏡１０３及び第２楕円面鏡１０４を介して集光させた照明光により検査対象１１０を照明するステップと、を備える。【選択図】図１