SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD

To provide a surface inspection device that can properly inspect presence or absence of surface unevenness of an inspection object.SOLUTION: A surface inspection device 1 comprises: an edge extraction image generation unit 40 that generates an edge extraction image as to a photographed image photographing an inspection object having a plurality of inspection patterns P projected; a correction coefficient setting unit 50 that sets a correction coefficient correcting intensity of a first edge in the edge extraction image and intensity of a second edge therein so as to reduce a degree of impact of one of the intensity of the first edge and the intensity of the second edge with respect to the other on the basis of the intensity of the first edge and the intensity of the second edge; a corrected edge extraction image generation unit 70 that generates a corrected edge extraction image on the basis of the corrected intensity of the first edge and intensity of the second edge, using the correction coefficient; an integration image generation unit 80 that generates an integration image integrating a luminance value on the basis of the corrected edge extraction image; and a determination unit 90 that determines presence or absence of surface unevenness of the inspection object on the basis of the integration image.SELECTED DRAWING: Figure 1 【課題】検査対象物の表面の凹凸の有無を適切に検査可能な表面検査装置を提供する。【解決手段】表面検査装置１は、複数の検査パターンＰが投影された検査対象物を撮像した撮像画像についてエッジ抽出画像を生成するエッジ抽出画像生成部４０と、エッジ抽出画像における第１エッジの強度と第２エッジの強度とに基づいて、第１エッジの強度及び第２エッジの強度のうちの一方に対する他方の影響度を低減するように、第１エッジの強度及び第２エッジの強度を補正する補正係数を設定する補正係数設定部５０と、補正係数を用いて補正された第１エッジの強度及び第２エッジの強度に基づいて補正済エッジ抽出画像を生成する補正済エッジ抽出画像生成部７０と、補正済エッジ抽出画像に基づき輝度値を積算した積算画像を生成する積算画像生成部８０と、積算画像に基づいて検査対象物の表面の凹凸の有無を判定する判定部９０と、を備える。【選択図】図１