COOLING DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD

To provide a cooling device having a simple configuration.SOLUTION: A cooling device comprises: a tank; a first path in which a liquid phase refrigerant is circulated by a pump so that the liquid phase refrigerant is taken from the tank, cooled, and returned to the tank; and a second path branching off from the first path. The second path includes: a heater for heating the liquid phase refrigerant supplied from the first path; a restrictor for reducing the pressure of the refrigerant heated by the heater; and a carburetor for evaporating at least a part of the refrigerant having passed through the restrictor by the heat from an object to be cooled. The second path is configured to return the refrigerant having passed through the carburetor to the tank.SELECTED DRAWING: Figure 1 【課題】簡易な構成を有する冷却装置を提供する。【解決手段】冷却装置は、タンクと、前記タンクから液相の冷媒を取り出して冷却し前記タンクに戻すように液相の冷媒をポンプによって循環させる第１経路と、前記第１経路から分岐した第２経路とを備える。前記第２経路は、前記第１経路から供給される液相の冷媒を加熱する加熱器と、前記加熱器によって加熱された冷媒の圧力を降下させる絞りと、前記絞りを通過した冷媒の少なくとも一部を冷却対象物からの熱によって気化させる気化器とを含み、前記気化器を通過した冷媒を前記タンクに戻す。【選択図】図１