PROCESSING DEVICE AND PROCESSING METHOD

To accurately specify the surface resistivity in each direction of a sheet member having anisotropy.SOLUTION: The present invention comprises: a measurement unit 12 for supplying a measuring signal to two supply positions on the surface of a sheet member 100 and measuring the potential at a plurality of measurement positions on the surface; and a processing unit 15 for specifying surface resistivities ρ1, ρ2 in two directions on the surface on the basis of the measured potential values Va, Vb. The processing unit 15 repeatedly executes an evaluation value calculation process of calculating an evaluation value on the basis of each measured value and the theoretical value of potential at each measurement position calculated by assigning, to a calculation formula that is a solution of formula (1), a component of position vector indicating each measurement position and a first and a second set value having been discretionarily set assuming surface resistivities ρ1, ρ2, while changing the first and the second set values, and specifies the first and the second set values when the evaluation value satisfies a prescribed condition respectively as surface resistivities ρ1, ρ2. Formula (1): X*(σ'XV down-arrow (down-arrow up-arrow down-arrow r down-arrow))=-I(δ(up-arrow r-up-arrow r down-arrow s)-δ(up-arrow r-up-arrow r down-arrow d)).SELECTED DRAWING: Figure 1 【課題】異方性を有するシート体の各方向の表面抵抗率を正確に特定する。【解決手段】シート体１００の表面の２つの供給位置に測定用信号を供給して表面の複数の測定位置の電位を測定する測定部１２と、電位の測定値Ｖａ，Ｖｂに基づいて表面における第１方向および第２方向の表面抵抗率ρ１，ρ２を特定する処理部１５とを備え、処理部１５は、（１）式の解である算出式に、各測定位置を示す位置ベクトルの成分と表面抵抗率ρ１，ρ２として任意に設定した第１設定値および第２設定値とを代入して算出した各測定位置の電位の各理論値と各測定値とに基づいて評価値を算出する評価値算出処理を第１設定値および第２設定値を変更しつつ繰り返して実行し、評価値が規定条件を満たしたときの第１設定値および第２設定値をそれぞれ表面抵抗率ρ１，ρ２として特定する。∇・（σ'∇Ｖ(↑ｒ)）＝−Ｉ（δ（↑ｒ−↑ｒｓ）−δ（↑ｒ−↑ｒｄ））...（１）式【選択図】図１