APPARATUS AND METHOD FOR APPLYING LIQUID

To provide an apparatus and method for applying liquid, capable of facilitating detection of an anomaly of application while intermittent liquid application is performed for a substrate to which the liquid is applied and which is being conveyed.SOLUTION: An apparatus 1 for applying liquid, which is...

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Bibliographische Detailangaben
Hauptverfasser: YOKOBORI KAZUO, HANYA TAKAYUKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide an apparatus and method for applying liquid, capable of facilitating detection of an anomaly of application while intermittent liquid application is performed for a substrate to which the liquid is applied and which is being conveyed.SOLUTION: An apparatus 1 for applying liquid, which is used to intermittently apply liquid, comprises: a solenoid valve 4 for opening and closing a flow path of fluid; a liquid application unit 5; a pressure sensor 6; a timing control unit 8; and an arithmetic processing unit 9. The arithmetic processing unit 9 calculates: application start delay time d1 that is a difference between the time when an ON-signal is outputted to the solenoid valve 4, and the time when the ON-signal is outputted from the pressure sensor 6; and application end delay time d2 that is a difference between the time when an OFF-signal is outputted to the solenoid valve 4, and the time when the OFF-signal is outputted from the pressure sensor 6. The arithmetic processing unit determines that an anomaly has occurred when the application start delay time d1 or the application end delay time d2 is out of a predetermined range.SELECTED DRAWING: Figure 2 【課題】塗布の異常を、搬送中の被塗布基材に対する液体の間欠塗布を行いつつ、容易に検知可能な液体塗布装置及び液体塗布方法を提供すること。【解決手段】流体の流路を開閉する電磁弁4、液体塗布部5、圧力センサ6、タイミング制御部8及び演算処理部9を有する、液体の間欠塗布するための液体塗布装置1であって、演算処理部9は、電磁弁4に対してオン信号が出力された時刻と圧力センサ6からオン信号が出力された時刻との差分である塗布開始時遅れ時間d1、及び電磁弁4に対してオフ信号が出力された時刻と圧力センサ6からオフ信号が出力された時刻との差分である塗布終了時遅れ時間d2を算出し、塗布開始時遅れ時間d1又は塗布終了時遅れ時間d2が、既定の範囲から外れたときに塗布に異常が生じたと判定する。【選択図】図2