MEMS OSCILLATOR

To provide a MEMS oscillator capable of reducing influences of an external stress as much as possible.SOLUTION: A MEMS oscillator comprises: a base 6 that has a housing recessed part 5: an IC chip 3 that includes an oscillation circuit; a MEMS element 2 that includes a MEMS resonator; and a lid 7 that closes an opening of the housing recessed part 5. The housing recessed part 5 in which the IC chip 3 and the MEMS element 2 are housed is sealed by the lid 7 air-tightly. At least an outer peripheral surface of the MEMS element 2 is exposed into a space S formed by bonding of the housing recessed part 5 and the lid 7. The MEMS element 2 is bonded at a decentered position on one surface of the IC chip 3 whose center coincides with a center C1 of the base 6.SELECTED DRAWING: Figure 4 【課題】外部応力の影響を可及的に低減したＭＥＭＳ発振器を提供する。【解決手段】収納凹部５を有するベース６と、発振回路を含むＩＣチップ３と、ＭＥＭＳ共振子を含むＭＥＭＳ素子２と、収納凹部５の開口を閉塞するリッド７とを備え、ＩＣチップ３及びＭＥＭＳ素子２が収納された収納凹部５が、リッド７によって気密に封止され、少なくともＭＥＭＳ素子２は、その外周面が収納凹部５とリッド７との接合によって形成される空間Ｓ内に露出しており、ＭＥＭＳ素子２は、ベース６の中心Ｃ１に、その中心が一致したＩＣチップ３の一方の面の偏心した位置に接合されている。【選択図】図４