SOLAR SLIT AND DEVICE AND METHOD FOR X-RAY DIFFRACTION DEVICE

To provide a solar slit, and a device and a method for X-ray diffraction that allow a measurement to be done in a short time and at a high resolution without causing a diffraction image on a detector to extend into an in-plate direction even if an X-ray irradiation region is spread on the surface of a sample by a measurement using GIXD.SOLUTION: A solar slit 100 has a plurality of metal thin boards 110 perpendicular to the bottom surface, the boards being lined in the arch pattern at predetermined intervals so that an X-ray is emitted from a specific focus to a radiation direction. The solar slit is formed in the position where the X-ray goes through, which is emitted to the sample at the angle of GIXD (Grazing Incident X-ray Diffraction) and is diffracted on the sample, with the center of the goniometer circle as the specific focus.SELECTED DRAWING: Figure 1 【課題】ＧＩＸＤによる測定でＸ線照射領域が試料表面上で広がっても、検出器上の回折像がインプレーン方向に広がらず、短い測定時間でかつ高い分解能での測定を可能にするソーラースリット、Ｘ線回折装置および方法を提供する。【解決手段】ソーラースリット１００は、各々が底面に対して垂直で、特定の焦点から放射方向にＸ線を通すように互いに所定の角度間隔をおいてアーチ形に並べられた複数の金属製の薄板１１０を備え、ゴニオメータ円の中心を特定の焦点として、ＧＩＸＤ（Grazing Incident X-ray Diffraction）用の角度で試料に照射され試料面上で回折されたＸ線が通る位置に設けられて用いられる。【選択図】図１