THIN-FILM ALLOY FOR STRAIN SENSORS WITH SUPERIOR THERMAL STABILITY AND HIGH STRAIN GAUGE FACTOR

THIN-FILM ALLOY FOR STRAIN SENSORS WITH SUPERIOR THERMAL STABILITY AND HIGH STRAIN GAUGE FACTOR

To provide a thin-film alloy for strain sensors, which has a small TCR and TCS, superior thermal stability, and a high strain gauge factor.SOLUTION: Provided herein is a thin-film alloy for strain sensors, which offers superior thermal stability, has a high strain gauge factor, and is represented by...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MURAKAMI SUSUMU, SHIRAKAWA KIWAMU, SASAKI SACHIHIRO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a thin-film alloy for strain sensors, which has a small TCR and TCS, superior thermal stability, and a high strain gauge factor.SOLUTION: Provided herein is a thin-film alloy for strain sensors, which offers superior thermal stability, has a high strain gauge factor, and is represented by a general formula: CrMAlB, where x, y, and z represents atomic ratios (at.%) (0.05≤x