MEMS OSCILLATOR

To provide an MEMS oscillator that reduces an influence of external stress as much as possible.SOLUTION: An MEMS oscillator includes a base 6 having a housing recess 5, an IC chip 3 including an oscillation circuit, an MEMS element 2 including an MEMS resonator, and a lid 7 that closes an opening of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MORIWAKI TORU, YAMASHITA MASAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY GENERATION OF NOISE BY SUCH CIRCUITS GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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