MEMS OSCILLATOR

To provide an MEMS oscillator that reduces an influence of external stress as much as possible.SOLUTION: An MEMS oscillator includes a base 6 having a housing recess 5, an IC chip 3 including an oscillation circuit, an MEMS element 2 including an MEMS resonator, and a lid 7 that closes an opening of the housing recess 5, and the housing recess 5 in which the IC chip 3 and the MEMS element 2 are housed is hermetically sealed by the lid 7, and at least an outer peripheral surface of the MEMS element 2 is exposed in a space S formed by the junction of the housing recess 5 and the lid 7, and the IC chip 3 is bonded to a bottom surface of the housing recess 5 of the base 6 via a conductive adhesive 10.SELECTED DRAWING: Figure 1 【課題】外部応力の影響を可及的に低減したＭＥＭＳ発振器を提供する。【解決手段】収納凹部５を有するベース６と、発振回路を含むＩＣチップ３と、ＭＥＭＳ共振子を含むＭＥＭＳ素子２と、収納凹部５の開口を閉塞するリッド７とを備え、ＩＣチップ３及びＭＥＭＳ素子２が収納された収納凹部５が、リッド７によって気密に封止され、少なくともＭＥＭＳ素子２は、その外周面が収納凹部５とリッド７との接合によって形成される空間Ｓ内に露出しており、ＩＣチップ３は、導電性接着剤１０を介してベース６の収納凹部５の底面に接合されている。【選択図】図１