LASER OSCILLATOR
To provide a laser oscillator enabling a dew condensation countermeasure for keeping the life of a light-emitting element longer while maintaining economy, as compared with the prior arts.SOLUTION: A laser oscillator includes: a laser beam generating unit 12; a heat exchanger 13; a cooling water byp...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a laser oscillator enabling a dew condensation countermeasure for keeping the life of a light-emitting element longer while maintaining economy, as compared with the prior arts.SOLUTION: A laser oscillator includes: a laser beam generating unit 12; a heat exchanger 13; a cooling water bypass circuit 14; a cooling water circuit 19 connected to the laser beam generating unit, the heat exchanger, and the cooling water bypass circuit; a housing storing the laser beam generating unit, the heat exchanger, the cooling water bypass circuit and the cooling water circuit; a cooling water circulation unit 20 circulating cooling water through the laser beam generating unit 12, the heat exchanger 13, and the cooling water bypass circuit 14 by the cooling water circuit 19; a first valve 31 adjusting the flow rate of the cooling water supplied to the laser beam generating unit 12; a second valve 32 adjusting the flow rate of the cooling water supplied to the heat exchanger 13; a third valve 33 adjusting the flow rate of the cooling water supplied to the cooling water bypass circuit 14; a dew point measurement unit 15 measuring a dew point at the inside of the housing 11; a water temperature measurement unit 16 measuring the water temperature of the cooling water; and a control unit 51 controlling the first valve 31, the second valve 32 and the third valve 33 on the basis of the dew point and the water temperature.SELECTED DRAWING: Figure 1
【課題】従来技術に比較して、経済性を保持しながら、発光素子の寿命をより長く保持するための結露対策が可能なレーザ発振器を提供すること。【解決手段】レーザ光発生部12と、熱交換器13と、冷却水バイパス回路14と、これらに接続する冷却水回路19と、これらを格納する筐体と、冷却水回路19により、レーザ光発生部12、熱交換器13、及び冷却水バイパス回路14に冷却水を循環させる冷却水循環部20と、レーザ光発生部12に供給される冷却水の流量を調整する第1の弁31と、熱交換器13に供給される冷却水の流量を調整する第2の弁32と、冷却水バイパス回路14に供給される冷却水の流量を調整する第3の弁33と、筐体11内部の露点を測定する露点測定部15と、冷却水の水温を測定する水温測定部16と、露点及び水温に基づいて、第1の弁31、第2の弁32、及び第3の弁33と制御する制御部51と、を備える。【選択図】図1 |
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