PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

To provide a piezoelectric element having a ZnO based piezoelectric material film without substantially including alkali metal, such as lithium and excellent in piezoelectric properties, and a method for manufacturing the same.SOLUTION: The piezoelectric element comprises a Ca containing ZnO based piezoelectric material film and first and second electrodes sandwiching the ZnO based piezoelectric material film and facing each other. The ZnO based piezoelectric material film has a first region in which a content molar ratio R of a Ca content to the total of the Ca content and a Zn content increases in the thickness direction of the ZnO based piezoelectric material film toward the second electrode from the first electrode.SELECTED DRAWING: Figure 2 【課題】リチウム等のアルカリ金属を実質的に含有しないＺｎＯ系圧電体膜を有し、優れた圧電特性を有する圧電素子の提供を課題とする。また、圧電素子の製造方法も課題とする。【解決手段】Ｃａを含有するＺｎＯ系圧電体膜と、ＺｎＯ系圧電体膜を挟んで対向する、第１電極及び第２電極と、を有し、第１電極から第２電極に向かうＺｎＯ系圧電体膜の厚み方向に沿って、Ｃａの含有量とＺｎの含有量との和に対するＣａの含有量の含有モル比Ｒが増加する第１領域を、ＺｎＯ系圧電体膜が有する、圧電素子。【選択図】図２