MEMS OSCILLATOR

To provide a MEMS oscillator in which influence of external stress is reduced as much as possible.SOLUTION: A MEMS oscillator includes: a base 6 having a housing recess 5; an IC chip 3 including an oscillation circuit; a MEMS element 2 including a MEMS resonator; and a lid 7 for closing an opening o...

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Bibliographische Detailangaben
Hauptverfasser:	MORIWAKI TORU, YAMASHITA MASAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION OF NOISE BY SUCH CIRCUITS GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a MEMS oscillator in which influence of external stress is reduced as much as possible.SOLUTION: A MEMS oscillator includes: a base 6 having a housing recess 5; an IC chip 3 including an oscillation circuit; a MEMS element 2 including a MEMS resonator; and a lid 7 for closing an opening of the housing recess 5. The housing recess 5 in which the IC chip 3 and the MEMS element 2 are stored is hermetically sealed by the lid 7. At least an outer peripheral surface of the MEMS element 2 is exposed in a space S formed by junction of the housing recess 5 and the lid 7.SELECTED DRAWING: Figure 1 【課題】外部応力の影響を可及的に低減したＭＥＭＳ発振器を提供する。【解決手段】収納凹部５を有するベース６と、発振回路を含むＩＣチップ３と、ＭＥＭＳ共振子を含むＭＥＭＳ素子２と、収納凹部５の開口を閉塞するリッド７とを備え、ＩＣチップ３及びＭＥＭＳ素子２が収納された収納凹部５が、リッド７によって気密に封止され、少なくともＭＥＭＳ素子２は、その外周面が収納凹部５とリッド７との接合によって形成される空間Ｓ内に露出している。【選択図】図１