ELECTRON GUN AND ELECTRON BEAM APPARATUS
To provide an electron gun that can short between an emitter and an electron gun electrode in a state in which high voltage is applied.SOLUTION: An electron gun 100 comprises: an emitter; an electron gun electrode; and a shorting mechanism part 10 that sets the emitter and the electron gun electrode...
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Zusammenfassung: | To provide an electron gun that can short between an emitter and an electron gun electrode in a state in which high voltage is applied.SOLUTION: An electron gun 100 comprises: an emitter; an electron gun electrode; and a shorting mechanism part 10 that sets the emitter and the electron gun electrode to be the same potential. The shorting mechanism part 10 comprises: a first switch member 110 in which a first switch electrode connected to the emitter and a second switch electrode connected to the electron gun electrode are provided; a second switch member 120 in which a third switch electrode is provided; and a driving unit 130 that switches between a state in which the first switch electrode and the second switch electrode contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode, by operating at least one of the first switch member 110 and the second switch member 120, and the shorting mechanism part 10 is the same potential as predetermined voltage.SELECTED DRAWING: Figure 5
【課題】高電圧が印加された状態で、エミッタと電子銃電極とをショートさせることができる電子銃を提供する。【解決手段】電子銃100は、エミッタと、電子銃電極と、エミッタと電子銃電極とを同電位にするためのショート機構部10と、を含み、ショート機構部10は、エミッタに接続された第1スイッチ電極および電子銃電極に接続された第2スイッチ電極が設けられた第1スイッチ部材110と、第3スイッチ電極が設けられた第2スイッチ部材120と、第1スイッチ部材110および第2スイッチ部材120の少なくとも一方を動作させて、第1スイッチ電極および第2スイッチ電極と第3スイッチ電極とが接触している状態と、第1スイッチ電極および第2スイッチ電極と第3スイッチ電極とが離間している状態と、を切り替える駆動部130と、を有し、ショート機構部10は、所定電圧と同電位である。【選択図】図5 |
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