IMPRINT DEVICE

To provide an imprint device capable of preventing the foreign material which can adhere to an imprint mold from peeling away by the gas supplied between the imprint mold and a transferred substrate.SOLUTION: An imprint device comprises a mold holder, a substrate stage, and a gas supply nozzle. The mold holder can hold an imprint mold having an uneven structure. The substrate stage is mounted with the transferred substrate to which the uneven structure of the imprint mold is transferred. The gas supply nozzle protrudes from the holding surface holding the imprint mold in the mold holder toward the substrate stage side, and supplies a gas between the transferred substrate on the substrate stage and the imprint mold held in the mold holder. The imprint mold comprises a base material including a first surface and a second surface facing the first surface, the uneven structure formed in the pattern region set on the first surface side of the base material, and a through hole penetrating between the first and second surfaces of the base material outside the pattern region. The gas supply nozzle is provided at the position corresponding to the through hole of the imprint mold. An outer diameter of the gas supply nozzle is smaller than an inner diameter of the through hole to such a degree that the gas supply nozzle can be loosely inserted into the through hole when the imprint mode is held in the mold holder.SELECTED DRAWING: Figure 1 【課題】インプリントモールドに付着され得る異物がインプリントモールドと被転写基板との間に供給されるガスによって剥がれ落ちることを防止可能なインプリント装置を提供する。【解決手段】インプリント装置は、凹凸構造を有するインプリントモールドを保持可能なモールドホルダ、凹凸構造が転写される被転写基板が載置される基板ステージ及びモールドホルダのインプリントモールドを保持する保持面から基板ステージ側に向かって突出し、基板ステージとモールドホルダとの間にガスを供給するガス供給ノズルを備え、インプリントモールドは、第１面及びそれに対向する第２面を有する基材と、第１面側に形成されてなる凹凸構造と、第１面及び第２面間を貫通する貫通孔とを有し、ガス供給ノズルは、貫通孔に対応する位置に設けられ、ガス供給ノズルの外径は、貫通孔に遊挿され得る程度に貫通孔の内径よりも小さい。【選択図】図１