INSPECTION APPARATUS AND INSPECTION METHOD

To provide an inspection apparatus capable of performing a high-accuracy inspection by a simple constitution, and an inspection method.SOLUTION: An inspection apparatus according to an embodiment includes: a first reflection part which has a side surface including a central axis and inclined in the direction of getting closer to the central axis as it gets farther away from a bottom surface, in a cross-section in a direction parallel to the central axis; a second reflection part which assumes an annular shape, which surrounds the first reflection part and which is provided coaxially with the first reflection part; and a detection part which can be attached to a machine to be inspected and which can apply laser light to the side surface of the first reflection part.SELECTED DRAWING: Figure 1 【課題】簡易な構成で高精度の検査を行うことができる検査装置および検査方法を提供することである。【解決手段】実施形態に係る検査装置は、中心軸を含み、前記中心軸に平行な方向の断面において、底面から離れるに従い前記中心軸に近づく方向に傾斜した側面を有する第１の反射部と、環状を呈し、前記第１の反射部を囲み、前記第１の反射部と同芯に設けられた第２の反射部と、検査対象の機械に取り付け可能とされ、前記第１の反射部の側面にレーザ光を照射可能な検出部と、を備えている。【選択図】図１