DIFFRACTION OPTICAL ELEMENT, LIGHT IRRADIATION DEVICE, LIGHT IRRADIATION SYSTEM AND CORRECTION METHOD OF PROJECTION PATTERN

To provide a diffraction optical element capable of easily correcting distortion caused by an imaging lens, a light irradiation device, a light irradiation system and a correction method of a projection pattern.SOLUTION: A diffraction optical element 10 is a diffraction optical element for shaping l...

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Bibliographische Detailangaben
Hauptverfasser:	INAZUKI YUICHI, OKAWA KOJIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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