DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME

To provide a method of stably manufacturing a dynamic quantity sensor with high reliability by preventing a movable part provided to a semiconductor substrate from sticking on a glass substrate, and then preventing an electrode from deteriorating.SOLUTION: A dynamic quantity sensor comprises: a first structure having a frame part having an opening, a displacement part provided in the opening and displaced with respect to the frame part, and a flexible part connecting the frame part and displacement part together; a second structure having a fixed part joined to the frame part and a weight part provided apart from the fixed part and joined to the displacement part; and a support substrate made of silica glass including alkali metal and having a first plane facing the second structure and a second plane positioned on the opposite side from the first plane, the alkali metal concentration at a part of the support substrate which faces the weight part being not different from the original concentration of the silica glass, and the alkali metal concentration of a part facing the fixed part being lower than the original concentration of the silica glass.SELECTED DRAWING: Figure 1 【課題】半導体基板に設けられた可動部とガラス基板との貼り付きを防止し、電極の劣化を防止することにより、信頼性の高い力学量センサを安定的に製造する方法を提供する。【解決手段】開口を有する枠部と、開口内に設けられ、枠部に対して変位する変位部と、枠部と変位部とを接続する可撓部と、を有する第１構造体と、枠部に接合される固定部と、固定部と離隔して設けられ、変位部に接合される錘部と、を有する第２構造体と、アルカリ金属を含むケイ酸ガラスから構成され、第２構造体に対向する第１面及び第１面と反対側に位置する第２面を有し、第１面が固定部と接合される支持基板と、を備え、支持基板の錘部と対向する部分におけるアルカリ金属濃度は、ケイ酸ガラスの元の濃度と変わらず、固定部に対向する部分におけるアルカリ金属濃度は、ケイ酸ガラスの元の濃度より低くなっている。【選択図】図１