METHOD FOR FORMING POLYARYL POLYMER AND POLYMER FORMED BY THE SAME

To provide a simpler polymerization method of a polyaryl polymer useful as a precursor of an electrically conductive polymer and as a component of a resist or a lower layer composition for photolithography among other applications.SOLUTION: It is specified that a polyaryl polymer can be produced by...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OBER MATTHIAS S, ARKADY KRASOVSKIY, PATRICK HANLEY
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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