METHOD FOR FORMING POLYARYL POLYMER AND POLYMER FORMED BY THE SAME

To provide a simpler polymerization method of a polyaryl polymer useful as a precursor of an electrically conductive polymer and as a component of a resist or a lower layer composition for photolithography among other applications.SOLUTION: It is specified that a polyaryl polymer can be produced by...

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Hauptverfasser:	OBER MATTHIAS S, ARKADY KRASOVSKIY, PATRICK HANLEY
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMISTRY COMPOSITIONS BASED THEREON MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	To provide a simpler polymerization method of a polyaryl polymer useful as a precursor of an electrically conductive polymer and as a component of a resist or a lower layer composition for photolithography among other applications.SOLUTION: It is specified that a polyaryl polymer can be produced by the catalytic reaction of an aryl fluorosulfonyl group and a boron functionalized aryl group. Kinds of two functional groups may be positioned on the same monomer capable of being polymerized with itself or on another monomer capable of being copolymerized. A fluorosulfonyl-substituted aryl monomer is prepared in-situ by the reaction of corresponding phenol and fluorinated sulfuryl (FS(O)F) and can be used without purification other than degasification.SELECTED DRAWING: Figure 1 【課題】電気伝導性ポリマーの前駆体として、及び、他の用途の中でも、フォトリソグラフィー用のレジストまたは下層組成物の成分として有用なポリアリールポリマーのより単純な重合法の提供。【解決手段】アリールフルオロスルホニル基とホウ素官能化アリール基との触媒反応により、ポリアリールポリマーが生成され得ることを特定した。２つの官能基の種類は、それ自体と重合され得る同じモノマー上に、または共重合され得る異なるモノマー上に位置してもよい。フルオロスルホニル置換アリールモノマーは、対応するフェノールとフッ化スルフリル（ＦＳ（Ｏ）２Ｆ）との反応によりｉｎ−ｓｉｔｕで調製され、脱気以外精製することなく使用され得る。【選択図】図１