METAL THIN PLATE INSPECTION DEVICE AND METHOD FOR INSPECTING METAL THIN PLATE
To provide an inspection device and a method for inspection that can significantly increase the accuracy of detecting a fine defect by a simple device structure and can suppress outflow of defective items.SOLUTION: The metal thin plate inspection device for inspecting a metal thin plate includes: an...
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Sprache: | eng ; jpn |
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Zusammenfassung: | To provide an inspection device and a method for inspection that can significantly increase the accuracy of detecting a fine defect by a simple device structure and can suppress outflow of defective items.SOLUTION: The metal thin plate inspection device for inspecting a metal thin plate includes: an inspection board on which a metal thin plate is to be put; a first light source unit for irradiating the surface of the inspection board with stripe light; and a second light source unit for irradiating the inspection board with light from a direction different from the direction from which the stripe light is emitted, the first light source desirably having a first light source for emitting light to the inspection board and a stripe pattern formation member between the first light source and the inspection board for irradiating the surface of the inspection board with a stripe pattern by light from the first light source.SELECTED DRAWING: Figure 1
【課題】 簡易な装置構成で微小欠陥の検出精度を大幅に向上させ、不良品の流出を抑制することが可能な検査装置および検査方法を提供する。【解決手段】 金属薄板を検査するための金属薄板検査装置において、金属薄板を載置するための検査台と、前記検査台上に縞状光を照射する第一光源部と、前記縞状光とは異なる方向から、前記検査台に向けて光を照射する第二光源と、を有する金属薄板検査装置。前記第一光源部は、前記検査台に向けて光を照射する第一光源と、前記第一光源と前記検査台との間に配置され、前記第一光源からの光により検査台上に縞模様を照射する縞模様形成部材と、を備えることが好ましい。【選択図】 図1 |
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