DICING TAPE AND DICING DIE-BONDING FILM

To provide a dicing tape and a dicing die-bonding film (DDAF, Dicing Die attach film), which are suitable for widening the clearance between DAF-attached semiconductor chips on a dicing tape while suppressing the float-up of the chips from a dicing tape after dicing in an expanding step which is to...

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Bibliographische Detailangaben
Hauptverfasser: MIZOBATA KAORI, ONISHI KENJI, SUGIMURA TOSHIMASA, TAKAMOTO HISAHIDE, AKAZAWA MITSUHARU, KOSAKA NAOFUMI, KIMURA TAKEHIRO, TSURUSAWA TOSHIHIRO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a dicing tape and a dicing die-bonding film (DDAF, Dicing Die attach film), which are suitable for widening the clearance between DAF-attached semiconductor chips on a dicing tape while suppressing the float-up of the chips from a dicing tape after dicing in an expanding step which is to be performed with a DDAF for obtaining die-bonding film(DAF)-attached semiconductor chips, and suitable for realizing satisfactory easiness of pickup in a pick-up step.SOLUTION: As to a dicing tape 10 of the present invention, the ratio of a tensile stress caused at a distortion value of 20% in a tensile test (a test pieces of 20 mm in width, an initial inter-chuck distance of 100 mm, 23°C) with a tensile speed of 1000 mm/minute to a tensile stress caused at a distortion value of 20% in a tensile test (a test piece of 20 mm in width, an initial inter-chuck distance of 100 mm, 23°C) with a tensile speed of 10 mm/minute is 1.4 or more. A DDAF of the invention comprises: the dicing tape 10; and a DAF 20 on its sticker layer 12.SELECTED DRAWING: Figure 1 【課題】ダイボンドフィルム(DAF)付き半導体チップを得るためにダイシングダイボンドフィルム(DDAF)を使用して行うエキスパンド工程にてダイシングテープ上の割断後のDAF付き半導体チップにつきダイシングテープからの浮きを抑制しつつ離間距離を広げるのに適するとともに、ピックアップ工程にて良好なピックアップ性を実現するのに適した、ダイシングテープ及びDDAFを、提供する。【解決手段】本発明のダイシングテープ10は、引張速度10mm/分での引張試験(試験片幅20mm,初期チャック間距離100mm,23℃)にて歪み値20%で生ずる引張応力に対する、引張速度1000mm/分での引張試験(試験片幅20mm,初期チャック間距離100mm,23℃)にて歪み値20%で生ずる引張応力の比の値が、1.4以上である。本発明のDDAFは、ダイシングテープ10とその粘着剤層12上のDAF20とを含む。【選択図】図1