MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE

To provide a measurement processing method for shortening the time required for inspection of a specimen.SOLUTION: A measurement processing method includes: setting an evaluation area only in a partial area of a specimen; and displaying an acquired result of inspection with an X-ray only for the eva...

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Hauptverfasser: KAWAI AKITOSHI, MACHII NOBUKATSU, HAYANO FUMITOMO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a measurement processing method for shortening the time required for inspection of a specimen.SOLUTION: A measurement processing method includes: setting an evaluation area only in a partial area of a specimen; and displaying an acquired result of inspection with an X-ray only for the evaluation area in order to grasp the state of the evaluation area.SELECTED DRAWING: Figure 2 【課題】被検物の検査に要する時間を短くする、測定処理方法を提供する。【解決手段】測定処理方法は、被検査物の一部の領域にのみ評価領域を設定することと、前記評価領域の状態を把握するために、取得されたX線による検査結果を前記評価領域のみに対応して表示することと、を含む。【選択図】図2