SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
To provide an MISFET on a semiconductor substrate, which has an equal channel length all around.SOLUTION: An MISFET comprises: a pair of SiGe layers 4 (first semiconductor layers) provided on an Si substrate 1 in which a trench lies partially; a pair of SiGe layers 5 (second semiconductor layers) pr...
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Format: | Patent |
Sprache: | eng ; jpn |
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