THERMAL FLOWMETER

To provide a thermal flowmeter having a sub-passage of a curved folded-back shape and not of a loop-like circulating shape, in which a lack of balance in the flow velocity distribution of a gas being measured is suppressed.SOLUTION: A detour passage 113 includes a direction-changing part 113a curved...

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Bibliographische Detailangaben
Hauptverfasser: SAITO TOMOAKI, FUKAYA SEIJI, SAITO SUNAO, TASHIRO SHINOBU, UENODAN AKIRA
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a thermal flowmeter having a sub-passage of a curved folded-back shape and not of a loop-like circulating shape, in which a lack of balance in the flow velocity distribution of a gas being measured is suppressed.SOLUTION: A detour passage 113 includes a direction-changing part 113a curved or branched from an inlet passage 111 in a direction that intersects a main flow direction F, a turnaround part 113b curved so as to turn around toward an outlet passage 112, and an inner circumferential resistance part 113c provided between this turnaround part 113b and the direction-changing part 113a. The pressure loss of the inner circumferential resistance part 113c to a gas G being measured that flows on the inner circumferential side of the detour passage 113 is higher than the pressure loss to the gas G being measured that flows on the outer circumferential side of the detour passage 113. A flow rate measuring element 120 is arranged between the inner circumferential resistance part 113c of the detour passage 113 and the outlet passage 112.SELECTED DRAWING: Figure 2 【課題】ループ状の周回形状を有しない湾曲した折返し形状の副通路を有する熱式流量計において、被計測気体の流速分布の偏りを抑制する。【解決手段】迂回通路113は、入口通路111から主流れ方向Fに交差する方向に湾曲または分岐した方向転換部113aと、出口通路112に向けて折り返すように湾曲した折返し部113bと、この折返し部113bと方向転換部113aとの間に設けられた内周抵抗部113cとを有している。内周抵抗部113cは、迂回通路113の内周側を流れる被計測気体Gに対する圧力損失が迂回通路113の外周側を流れる被計測気体Gに対する圧力損失よりも高い。流量計測素子120は、迂回通路113の内周抵抗部113cと出口通路112との間に配置されている。【選択図】図2