TEMPLATE, NITRIDE SEMICONDUCTOR ULTRAVIOLET LIGHT-EMITTING ELEMENT, AND MANUFACTURING METHOD FOR TEMPLATE

To provide a nitride semiconductor ultraviolet light-emitting element dramatically improving crystallinity.SOLUTION: A template comprises: a sapphire substrate taking, as its main face, a (0001) face or a face tilted from the (0001) face by a predetermined angle; and an AlN layer constituted by an A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HIRANO HIKARI, NAGASAWA AKISUKE
Format: Patent
Sprache:eng ; jpn
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