CONCENTRATION MANAGEMENT APPARATUS OF CHEMICAL SOLUTION, CALCULATION METHOD OF CONCENTRATION MANAGEMENT CHARGE AND CONCENTRATION MANAGEMENT CHARGE CALCULATION SYSTEM, AND CHEMICAL SOLUTION REGENERATOR, CALCULATION METHOD OF CHEMICAL SOLUTION REGENERATION PROCESSING CHARGE AND REGENERATION PROCESSING CHARGE CALCULATION SYSTEM

To provide a concentration management apparatus used for providing a service of managing the concentration of a chemical solution used for manufacturing a semiconductor and a liquid crystal display board, a chemical solution regenerator used for providing a service of regenerating the chemical solut...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	NAKAGAWA TOSHIMOTO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CALCULATING CINEMATOGRAPHY COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HOLOGRAPHY MATERIALS THEREFOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide a concentration management apparatus used for providing a service of managing the concentration of a chemical solution used for manufacturing a semiconductor and a liquid crystal display board, a chemical solution regenerator used for providing a service of regenerating the chemical solution, and method and system of calculating the charge for providing the service by using these apparatus.SOLUTION: A concentration management apparatus 1 includes integration flow meters 51-53 in a pipeline for supplying replenisher. A chemical solution regenerator 2 includes an integration flowmeter 54 in a pipeline for supplying reproduced chemical solution. Charges of concentration management and regeneration processing of the chemical solution are calculated on the basis of integrated flow rate in a prescribed period measured by the integration flowmeter. Integration flow meters 221-225 are provided with a communication function and connected with a network 201. The integration flow rate is received by a server system 202 via the network and stored. The server system 202 includes a calculation part 205 for calculating the charge based on the integration flow rate of the prescribed period, for each integration flowmeter.SELECTED DRAWING: Figure 1 【課題】半導体、液晶ディスプレイ基板の製造に使用される薬液の濃度を管理する役務の提供に使われる濃度管理装置及び薬液を再生処理する役務の提供に使われる薬液再生装置、並びに、これらの装置を用いて提供される役務の提供に係る料金の算出方法及びシステムを提供する。【解決手段】濃度管理装置１は補充液を補給する配管に積算流量計５１〜５３を備える。薬液再生装置２は再生薬液を供給する配管に積算流量計５４を備える。薬液の濃度管理や再生処理の料金は、積算流量計により計測された所定期間における積算流量に基づいて算出される。積算流量計２２１〜２２５は通信機能を備えることでネットワーク２０１に接続される。積算流量は、ネットワークを介してサーバシステム２０２に受信され記憶される。サーバシステム２０２は、積算流量計ごとに所定期間の積算流量に基づいて料金を算出する算出部２０５を備える。【選択図】図１