PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD

To provide an inspection device capable of generating an optical path so as not to allow an illumination field of light for auto-focusing to overlap with any one of illumination fields of two lights for a reflection inspection in a reflection/reflection inspection.SOLUTION: An inspection device includes: a first 1/2 wavelength plate 40 arranged on an optical path of an illumination optical system 172 so as to pass a part of a first inspection light and to convert a part of the first inspection light into a polarization wave in a first direction; a second 1/2 wavelength plate 42 arranged in a post-stage of an optical path from the 1/2 wavelength plate 40 so as to pass a part of the first inspection light, to convert a part of the first inspection light from a polarization wave in the first direction into a polarization wave in a second direction, and also to convert a remaining part of the first inspection light into a polarization wave in a third direction; and a Rochon prism 44 arranged in a post-stage of an optical path from the second 1/2 wavelength plate so as to perform separation among an orbit of a polarization wave in the second direction by a part of the first inspection light, an orbit of a polarization component in the second direction in a polarization wave in the third direction by the remaining part of the first inspection light, and an orbit of a polarization component in a fourth direction in a polarization wave in the third direction.SELECTED DRAWING: Figure 3 【課題】オートフォーカス用の光の照野が、反射／反射検査の２つの反射検査用の光のいずれの照野にも重ならないように光路を生成可能な検査装置を提供する。【解決手段】検査装置は、照明光学系１７２の光路上に配置され、第１の検査光の一部を通過させ、第１の検査光の一部を第１の方向の偏光波に変換する第１の１／２波長板４０と、１／２波長板４０よりも光路後段に配置され、第１の検査光の一部を通過させ、第１の検査光の一部を第１の方向の偏光波から第２の方向の偏光波に変換すると共に、第１の検査光の残部を第３の方向の偏光波に変換する第２の１／２波長板４２と、第２の１／２波長板よりも光路後段に配置され、第１の検査光の一部による第２の方向の偏光波の軌道と第１の検査光の残部による第３の方向の偏光波のうちの第２の方向の偏光成分の軌道と第３の方向の偏光波のうちの第４の方向の偏光成分の軌道とを分離するロションプリズム４４を備える。【選択図】図３