HYDROSTATIC SLIDE GUIDING DEVICE AND MACHINE TOOL WITH HYDROSTATIC SLIDE GUIDING DEVICE
To provide a low cost hydrostatic slide guiding device in which the support rigidity of a movable body with respect to a fixed body can be easily secured even if working accuracy and assembling accuracy are not high, and a machine tool with the hydrostatic slide guiding device.SOLUTION: A hydrostati...
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Zusammenfassung: | To provide a low cost hydrostatic slide guiding device in which the support rigidity of a movable body with respect to a fixed body can be easily secured even if working accuracy and assembling accuracy are not high, and a machine tool with the hydrostatic slide guiding device.SOLUTION: A hydrostatic slide guiding device 40 comprises: a fixed body 19 having a first vertical guiding face 16a and a second vertical guiding face 17a; a movable body 14 having a first vertical slide face 14a1 and a second vertical slide face 14a2; a fluid supply device 33; a pressure adjusting device 38; a hydrostatic support part 34 which is supplied with fluid by the fluid supply device, applied with fluid pressure P1 corresponding to a magnitude of a first clearance L1 between the first vertical guiding face and the first vertical slide face, and exerts support rigidity G corresponding to the magnitude of the first clearance L1 with respect to the movable body 14; and an energization force generation part 35 energizing the movable body 14 to a direction of the first vertical guiding face 16a by being supplied with the fluid which is pressure-adjusted to prescribed fluid pressure P2a by the pressure adjusting device 38. The pressure adjusting device 38 pressure-adjusts a magnitude of the prescribed fluid pressure so that the magnitude of the first clearance L1 reaches a set value.SELECTED DRAWING: Figure 2
【課題】加工精度及び組付け精度を高精度なものとしなくとも固定体に対する可動体の支持剛性が容易に確保できる低コストな静圧スライド案内装置及び静圧スライド案内装置を備えた工作機械を提供する。【解決手段】静圧スライド案内装置40は、第一縦案内面16a及び第二縦案内面17aを有する固定体19と、第一縦スライド面14a1及び第二縦スライド面14a2を有する可動体14と、流体供給装置33と、調圧装置38と、流体供給装置によって流体が供給され、第一縦案内面と第一縦スライド面との間の第一隙間L1の大きさに応じた流体圧P1が作用され、可動体14に対して第一隙間L1の大きさに応じた支持剛性Gを発揮する静圧支持部34と、調圧装置38によって所定流体圧P2aに調圧された流体が供給されることにより可動体14を第一縦案内面16aの方向に付勢する付勢力発生部35と、を備え、調圧装置38は、第一隙間L1の大きさが設定値となるよう所定流体圧の大きさを調圧する。【選択図】図2 |
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