ANALYSIS SYSTEM AND INTRODUCTION DEVICE FOR FLOATING MATTERS IN VACUUM ATMOSPHERE

PROBLEM TO BE SOLVED: To take out and analyze floating matters in a vacuum atmosphere of a semiconductor manufacturing device.SOLUTION: The interior of an introduction tank 26 is evacuated to a degree of vacuum equal to or lower than a to-be-measured zone 22 by a vacuum pump 28. Next, floating matte...

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Hauptverfasser:	TOMIHIRA SOTA, SHIMIZU SEIICHI, TANAKA TAKANORI, MORIYAMA MASATO, JEONG GYEONG-HWAN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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