ANALYSIS SYSTEM AND INTRODUCTION DEVICE FOR FLOATING MATTERS IN VACUUM ATMOSPHERE

PROBLEM TO BE SOLVED: To take out and analyze floating matters in a vacuum atmosphere of a semiconductor manufacturing device.SOLUTION: The interior of an introduction tank 26 is evacuated to a degree of vacuum equal to or lower than a to-be-measured zone 22 by a vacuum pump 28. Next, floating matters in the to-be-measured zone 22 are received in the introduction tank 26 from the to-be-measured zone 22 on an exhaust line 14 of a vacuum chamber 12 through a connection pipe 24. Thereafter, a gas supply device 30 supplies a carrier gas to the inside of the introduction tank 26 to bring it into an atmospheric pressure atmosphere. Further, by using the carrier gas, the floating matters are sent to a component analyzer 32. In the component analyzer 32, for example, the particle size distribution of components of the floating matters is measured. The control device opens and closes the respective valves in a predetermined order for this control.SELECTED DRAWING: Figure 1 【課題】半導体製造装置の真空雰囲気から浮遊物を外部に取りだして分析する。【解決手段】導入タンク２６内部を真空ポンプ２８で被測定ゾーン２２以下の真空度に真空引きする。次に、真空チャンバー１２の排気ライン１４上にある被測定ゾーン２２から連結管２４を通じて、被測定ゾーン２２中の浮遊物を導入タンク２６に受け入れる。その後、ガス供給装置３０が、導入タンク２６内部にキャリアガスを供給して、大気圧雰囲気にする。さらに、このキャリアガスにより、成分分析装置３２に浮遊物を送り込む。成分分析装置３２では、例えば、浮遊物の成分の粒径分布を測定する。制御装置は、この制御のために各パルブを所定の順に開閉する。【選択図】図１