MANUFACTURING METHOD OF INFRARED DETECTION DEVICE

PROBLEM TO BE SOLVED: To provide an infrared detection device capable of accurately recognizing an object spatially even when a low-cost condenser lens including an infrared detection part composed of infrared detection elements in a two-dimensional array for the purpose of space perception is used....

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1. Verfasser: HISHINUMA KUNIYUKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an infrared detection device capable of accurately recognizing an object spatially even when a low-cost condenser lens including an infrared detection part composed of infrared detection elements in a two-dimensional array for the purpose of space perception is used.SOLUTION: A cavity 14 corresponding to an infrared detection element 11 is formed by subjecting a semiconductor substrate (chip) 1 surface side to silicon anisotropic etching using alkali solution, and an infrared detection part including a plurality of infrared detection elements on the cavity 14 is formed from the surface side. A thermopile part is formed which outputs a thermal electromotive force generated by infrared detected by the infrared detection part. The semiconductor substrate 1 is thinned to the extent that each region on which the infrared detection element is formed is exposed through the cavity from the rear side. As infrared enters through the bottom of the opened cavity an absorption film of the element, the cavity itself only limits the infrared to the infrared entering the absorption film, and prevents the infrared diffusing in other directions from entering other elements.SELECTED DRAWING: Figure 1 【課題】空間認識を目的とした二次元アレイ状の赤外線検出素子から構成された赤外線検出部を用いた低コストの集光レンズを用いても対象物を正確に空間認識が出来る赤外線検出装置を提供する。【解決手段】半導体基板(チップ)1表面側からアルカリ溶液によるシリコン異方性エッチングにより赤外線検出素子11に対応するキャビティ14を形成し、前記表面側から前記キャビティ14上に複数の赤外線検出素子からなる赤外線検出部を形成する。前記赤外線検出部により検出した赤外線による熱起電力を出力するサーモパイル部を形成し、前記赤外線検出素子が形成された各領域が、それぞれの前記キャビティを通して前記裏面側から露出するまで前記半導体基板1を薄くする。赤外線が開口されたキャビティ底辺を通して素子の吸収膜に入射されるため、キャビティ自体が赤外線を吸収膜に入射するもののみに限り、他に拡散する赤外線は他の素子に及ばないように防ぐ。【選択図】 図1