ULTRASONIC RECEIVER

PROBLEM TO BE SOLVED: To enable easily analyzable output data to be obtained by a compact and low cost configuration, and in an apparatus diagnosing device, to detect abnormality that indicates a symptom of apparatus fault.SOLUTION: The present invention comprises an acoustic-electric conversion unit 10 equipped with n acoustic-electric converters 10-I to 10-n having different resonance frequencies f-f; and an amplification unit 12 having rectification amplifiers 12-I to 12-n for amplifying each of the signals outputted from the acoustic-electric conversion unit 10. The acoustic-electric converters 10-I to 10-n have sharp sensitivity peaks at the respective resonance frequencies and, by adjusting these resonance frequencies to a frequency that indicates abnormality and analyzing the patterns of frequency signal strength extracted from the acoustic-electric conversion unit 10 and the amplification unit 12, abnormality that indicates a symptom of fault is precisely detected. The plurality of acoustic-electric converters constitute a piezoelectric type minute acoustic-electric converter array fabricated on the same substrate.SELECTED DRAWING: Figure 1 【課題】小型、低コストの構成で解析容易な出力データを得ることができ、また機器診断装置においては、機器の故障の前兆を示す異常を検出する。【解決手段】異なる共振周波数ｆ１〜ｆｎを有するｎ個の音響電気変換器１０−Ｉ〜１０−ｎを設けた音響電気変換部１０と、この音響電気変換部１０から出力されたそれぞれの信号を増幅する整流増幅器１２−Ｉ〜１２−ｎを有する増幅部１２とを設ける。音響電気変換器１０−Ｉ〜１０−ｎは、それぞれの共振周波数で鋭い感度ピークを有し、この共振周波数を異常を示す周波数に合わせ、音響電気変換部１０及び増幅部１２から抽出された周波数信号強度のパターンを解析することで、故障の前兆となる異常を的確に検出する。複数の音響電気変換器は、同一基板上に作製した圧電型微小音響電気変換器アレイとする。【選択図】図１