ZNO-BASED PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT

PROBLEM TO BE SOLVED: To provide a piezoelectric film which does not substantially contain an alkali metal such as lithium and has excellent piezoelectric characteristics, and a piezoelectric element.SOLUTION: The ZnO-based piezoelectric film contains Ca. A content molar ratio of Ca content to a sum...

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Hauptverfasser:	SHINKAWA TAKAMI, OKUNO SACHIHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SLAG TREATMENT OF NATURAL STONE
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a piezoelectric film which does not substantially contain an alkali metal such as lithium and has excellent piezoelectric characteristics, and a piezoelectric element.SOLUTION: The ZnO-based piezoelectric film contains Ca. A content molar ratio of Ca content to a sum of Ca content and a Zn content in a ZnO-based piezoelectric film is 0.12 to 0.50.SELECTED DRAWING: Figure 1 【課題】リチウム等のアルカリ金属を実質的に含有せず、優れた圧電特性を有する圧電体膜を提供することを課題とする。また、圧電素子を提供することも課題とする。【解決手段】Ｃａを含有するＺｎＯ系圧電体膜であって、ＺｎＯ系圧電体膜中におけるＣａの含有量とＺｎの含有量の和に対する、Ｃａの含有量の含有モル比が０．１２〜０．５０である、ＺｎＯ系圧電体膜。【選択図】図１