VARIABLE CAPACITANCE ELEMENT

PROBLEM TO BE SOLVED: To reduce equivalent series resistance.SOLUTION: A variable capacitance element comprises: a plurality of capacitors C1-C4 connected in series between a first signal terminal and a second signal terminal; a lower electrode 12 provided on a substrate, and that connects between at least two capacitors of the plurality of capacitors; a dielectric film 14 provided on the lower electrode so as to correspond to the at least two capacitors; at least two upper electrodes 16 provided on the dielectric film so as to correspond to the at least two capacitors, respectively; and a conductive layer 26 extending in an arrangement direction from one of the at least two upper electrodes to the other, and provided at a lateral part of the at least two upper electrodes so as to be electrically contacted with the lower electrode.SELECTED DRAWING: Figure 4 【課題】等価直列抵抗を低減すること。【解決手段】第１信号端子と第２信号端子との間に直列に接続された複数のキャパシタＣ１−Ｃ４と、基板上に設けられ、前記複数のキャパシタのうち少なくとも２つのキャパシタを接続する下部電極１２と、前記下部電極上に、前記少なくとも２つのキャパシタに対応し設けられた誘電体膜１４と、前記誘電体膜上に、前記少なくとも２つのキャパシタにそれぞれ対応し設けられた少なくとも２つの上部電極１６と、前記少なくとも２つの上部電極の一方から他方の配列方向に延伸し、前記少なくとも２つの上部電極の側方に、前記下部電極と電気的に接触するように設けられた導電層２６と、を具備する可変容量素子。【選択図】図４