ANGULAR VELOCITY SENSOR PRODUCTION METHOD
PROBLEM TO BE SOLVED: To provide an angular velocity sensor production method which can rapidly and suitably produce an angular velocity sensor reducing unnecessary vibration and excellent in a temperature characteristic.SOLUTION: An angular velocity sensor production method comprises: a provision s...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an angular velocity sensor production method which can rapidly and suitably produce an angular velocity sensor reducing unnecessary vibration and excellent in a temperature characteristic.SOLUTION: An angular velocity sensor production method comprises: a provision step of providing a vibration piece comprising a base portion, a drive unit extending from the base portion, having an electrode for drive formed thereon, and having a part of which a cross section perpendicular to the extending direction has a polygonal shape, and a detection unit extending from the base portion and having an electrode for detection formed thereon; a detection step of detecting a vibration leakage amount output from the electrode for detection while the electrode for drive is electrified to drive the drive unit to vibrate; and a processing step of processing, with a focused ion beam, at least a part of a ridge line part of the part of the drive unit of which the cross section perpendicular to the extending direction has the polygonal shape on the basis of the vibration leakage amount.SELECTED DRAWING: Figure 1
【課題】不要振動が低減されるとともに温度特性に優れた角速度センサーを迅速かつ適切に製造することができる角速度センサーの製造方法を提供すること。【解決手段】基部と、前記基部から延出し、駆動用電極が形成されており、延出する方向に垂直な断面の形状が多角形からなる部分を有する駆動部と、前記基部から延出し、検出用電極が形成されている検出部と、を備える振動片を用意する用意工程と、前記駆動用電極に通電して前記駆動部を駆動振動させ、前記検出用電極により出力された振動漏れ量を検出する検出工程と、前記振動漏れ量に基づいて前記駆動部の前記延出する方向に垂直な断面の形状が多角形からなる部分の稜線部の少なくとも一部を集束イオンビームにより加工する加工工程と、を含むことを特徴とする角速度センサーの製造方法。【選択図】図1 |
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