LINEAR MOTOR AND STAGE DEVICE
PROBLEM TO BE SOLVED: To provide a linear motor capable of reducing a leakage magnetic flux at an end part of a movable element including a field magnet.SOLUTION: A field magnet array 24 is fixed to a yoke 22 and forms a field magnetic field at a magnetic gap 34. A movable element 20 is provided mov...
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| Sprache: | eng ; jpn |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a linear motor capable of reducing a leakage magnetic flux at an end part of a movable element including a field magnet.SOLUTION: A field magnet array 24 is fixed to a yoke 22 and forms a field magnetic field at a magnetic gap 34. A movable element 20 is provided movably in a first direction. A shield member 30 includes a plate-like part 30b extending in the first direction at an opposite side to the magnetic gap 34, of the yoke 22. The plate-like part 30b has an extending part 30n extending to both sides beyond a movable range of the yoke 22 in the first direction.SELECTED DRAWING: Figure 1
【課題】界磁磁石を含む可動子の端部における漏れ磁束を低減することが可能なリニアモータを提供する。【解決手段】界磁磁石列２４は、ヨーク２２に固定され磁気的空隙３４に界磁磁界を形成する。可動子２０は第１方向に移動可能に設けられる。シールド部材３０は、ヨーク２２の磁気的空隙３４とは反対側において第１方向に延在する板状部３０ｂを含む。板状部３０ｂは、第１方向においてヨーク２２の可動範囲を越えて両側に延びる延出部３０ｎを有する。【選択図】図１ |
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