PROCESSING METHOD
PROBLEM TO BE SOLVED: To process a workpiece without causing clogging of a cutting blade and without using a laser processing apparatus when a plate-like workpiece formed into a film is divided.SOLUTION: A processing method includes a groove forming step of forming a groove M1 which does not reach a...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To process a workpiece without causing clogging of a cutting blade and without using a laser processing apparatus when a plate-like workpiece formed into a film is divided.SOLUTION: A processing method includes a groove forming step of forming a groove M1 which does not reach a film W2 from the surface W1a of a workpiece W along a dividing line S and in which a plate-like object W1 is left as a remaining portion W1d in the groove bottom, an expand sheet attaching step of attaching an expand sheet T3 to a front surface W1a of the workpiece W after the groove forming step, and an expand band step of dividing the film W2 along the groove M1 together with the remaining portion W1d by cooling the workpiece W to 0°C or less and at a temperature at which the expand sheet T3 does not break to expand the expand sheet T3 after the expand sheet attaching step.SELECTED DRAWING: Figure 6
【課題】成膜された板状の被加工物を分割する場合に、切削ブレードに目詰まりを発生させることなく、かつ、レーザ加工装置を利用せずとも被加工物を加工できるようにする。【解決手段】被加工物Wの表面W1aから分断予定ラインSに沿って膜W2に至らず板状物W1を残し部W1dとして溝底に残した溝M1を形成する溝形成ステップと、溝形成ステップを実施した後に被加工物Wの表面W1aにエキスパンドシートT3を貼着するエキスパンドシート貼着ステップと、エキスパンドシート貼着ステップを実施した後、被加工物Wを0℃以下かつエキスパンドシートT3が破断しない温度に冷却してエキスパンドシートT3を拡張することで溝M1に沿って膜W2を残し部W1dとともに分断するエキスパンドステップと、を備えた加工方法である。【選択図】図6 |
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